| 摘要 |
<p> Provided are a probe unit and a shape-measuring device which are compact, have a simple configuration, and are capable of accurate measurement, even of objects to be measured that readily deform. This probe unit, together with a sensor, is attached a frame of a shape-measuring device, and is used to measure the shape of an object to be measured, wherein the probe unit has: a stylus for contacting an object to be measured; a probe structure linked to the stylus, the probe structure having an orientation detection plate that extends in a direction different from the direction of extension of the stylus and faces the sensor; a holding part for holding the probe structure in a relatively rotatable manner with respect to the frame; and a moving mechanism for moving the probe structure in the direction of extension of the stylus, with respect to the frame, the position of the orientation detection plate being detected by the sensor to calculate the orientation of the probe structure in a state in which the stylus has abutted the object to be measured, whereby the shape of the object to be measured is measured.</p> |
