DYNAMIC STRAIN SENSOR AND METHOD

摘要

A dynamic strain sensor includes a strain sensitive transistor and a light emitting diode coupled to the strain sensitive transistor. The dynamic strain sensor can include a piezoelectric layer incorporated into the structure of the strain sensitive transistor. The dynamic strain sensor can sense dynamic strain and can measure and monitor the dynamic strain wirelessly.

主权项

1. A dynamic strain sensor comprising:
a strain sensitive transistor, the sensitive transistor comprising:
a substrate;a gate metal electrode coupled to the substrate;a piezoelectric layer; anda semiconductor layer, wherein the piezoelectric layer is positioned between the gate metal electrode and the semiconductor layer; and a light emitting diode coupled to the strain sensitive transistor.