| 摘要 |
In the present invention, one first driving unit (5), which moves back and forth along an X direction and applies X-direction drive power to a mobile table (2), is disposed so as to apply X-direction drive power to a Y-direction center position of one X-direction end part of the mobile table (2). Two second driving units (6, 7), which move back and forth in a Y direction perpendicular to the X direction and apply Y-direction drive power to the mobile table (2), are disposed so as to have point symmetry about the center (O) of the mobile table (2). A plurality of planar guide bearings (3) are disposed in positions such that the sum of moment forces of the respective planar guide bearings (3) is zero in a central axis line along the X direction of the mobile table (2). The moment force is a product of a frictional force occurring in the planar guide bearings (3) due to the movement of the mobile table (2) and the Y-direction distance from the planar guide bearings (3) to the first driving unit (5). |
