| 摘要 |
PROBLEM TO BE SOLVED: To realize a plurality of types of polishing with a single polishing apparatus.SOLUTION: A polishing cushion according to one embodiment comprises a first outer layer facing one of a polishing member and a support member, a second outer layer facing the other of the polishing member and the support member, an inner layer positioned between the first outer layer and the second outer layer, and a plurality of spaces formed in the second outer layer, into which the inner layer can enter. The hardness of the inner layer is lower than both of the hardness of the first outer layer and the hardness of the second outer layer. |
