AMORPHOUS IONICALLY-CONDUCTIVE METAL OXIDES, METHOD OF PREPARATION, AND BATTERY

摘要

A method for forming an amorphous ionically conductive metal oxide, such as lithium lanthanum zirconium oxide (LLZO), by chemical vapor deposition (CVD), as well as to the ionically conductive material formed by the method, are provided. Such a material may be utilized as a solid electrolyte and/or as a solid separator in an all solid state lithium battery.

主权项

1. A method for synthesizing an amorphous ionically conductive metal oxide having formula MwM′xM″yM′″zCa,
wherein M is at least one alkali metal; M′ is at least one metal selected from the group consisting of lanthanides, barium, strontium, calcium, indium, magnesium, yttrium, scandium, chromium, aluminum, and alkali metals, provided that when M′ is an alkali metal, M′ further contains at least one non-alkali M′ metal; M″ is at least one metal selected from the group consisting of zirconium, tantalum, niobium, antimony, tin, hafnium, bismuth, tungsten, silicon, selenium, gallium and germanium; M′″ comprises oxygen and optionally at least one element selected from the group consisting of sulfur and halogens; and w, x, y, and z are positive numbers, including various combinations of integers and fractions or decimals, and “a” may be zero or a positive number; the method comprising:(a) introducing a precursor mixture comprising at least one reactant gas and at least one precursor material for each of M, M′, and M″ into a CVD reactor chamber;(b) providing a substrate in the CVD chamber; and(c) energizing the CVD reactor such that the amorphous ionically conductive metal oxide is deposited on the substrate.