Gas sensor having micro-package structure and method for making the same

摘要

A gas sensor having a micro-package structure includes a light-emitting unit, a light-receiving unit, and a signal-processing unit all deposited on a substrate, and a package body fixed to the substrate and having a chamber and a through hole. The chamber accommodates all the units and the through hole is over the substrate. Gas enters the chamber through the through hole. The light-emitting unit emits an optical signal that passes through the gas and then is received by the light-receiving unit. Then a signal-processing unit electrically connected to the light-receiving unit performs spectral analysis. Thereby, the gas sensor is advantageous for requiring low packaging costs and being compact.

主权项

1. A gas sensor having a micro-package structure, the gas sensor comprising:
a substrate, having a light-emitting area, a light-receiving area, and a signal-processing area; a light-emitting unit, being deposited in the light-emitting area and providing an optical signal; a light-receiving unit, being deposited in the light-receiving area and receiving the optical signal of the light-emitting unit; a signal-processing unit, being deposited in the signal-processing area and electrically connected to the light-receiving unit; and a package body, being fixed to the substrate and having a chamber and a through hole, wherein the chamber accommodates the light-emitting unit, the light-receiving unit, and the signal-processing unit, and the through hole is over the substrate.