| 摘要 |
PROBLEM TO BE SOLVED: To prevent damage of a workpiece by accurately positioning a measurement position of height position measuring means, at a position where the height position measuring means has to measure the height. ! SOLUTION: At a positional deviation detecting step, there is detected deviation between a position where imaging means 13 images an image, and a measurement position where height position measuring means 14 measures the height of a workpiece. At an area detecting step, the workpiece is imaged by the imaging means 13, and on the basis of the imaged image, there is calculated a position where the height position measuring means 14 has to measure the height of the workpiece. At an upper surface height position measuring step, the height position measuring means 14 is positioned, adding the deviation detected at the positional deviation detecting step to the position detected at the area detecting step, and the height of the upper surface of the workpiece is measured. At a processing step, |
