| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transport device capable of transporting a wafer without exposing the wafer under such an atmosphere that surface characteristics are changed or particles are deposited. ! SOLUTION: The wafer transport device is configured to transport a wafer W between load ports 61-61 which are a plurality of delivery positions, and a load lock chamber 81. The wafer transport device includes: a movable chamber 3 that is surrounded with wall parts 31-34 to make the inside into a substantially closed space, moves along a guide rail 26 and can oppose the load ports and the load lock chamber 81; and a transport arm 24 in which the wafer can be held by a pick 25 in a distal end portion. At least the pick can be accommodated within the movable chamber 3 together with the wafer and the pick moves in and moved out via openings 31a and 33a which are formed in the wall parts 31 and 33, such that the wafer can be delivered between the load ports and the load lock chamber which the movable c |
