发明名称 CHARGING DEVICE
摘要 PROBLEM TO BE SOLVED: To easily adjust pressing conditions for a surface of a machine platen.SOLUTION: A charging device includes: abrasive liquid supply means (14) for supplying an abrasive liquid containing abrasive grains onto a surface (21) of a machine platen (11); abrasive grain-embedding means (16) which embeds the abrasive grains in the abrasive liquid in the surface of the machine platen by a pressing member (36) which is supersonically oscillated; rotating means (17) to which a shaft of the abrasive grain-embedding means is connected and which rotates the abrasive grain-embedding means around the vertical axis; vertical movable means (18) for vertically moving the rotating means relative to the surface of the machine platen; and an electric power supply part (38) which impresses an AC voltage to an ultrasonic vibrator (37) which is provided to the pressing member. The electric power supply part has an electric power supply system equipped with a slip ring mechanism so as to avoid an interference between itself and the shaft of the abrasive grain-embedding means.
申请公布号 JP2015112683(A) 申请公布日期 2015.06.22
申请号 JP20130256620 申请日期 2013.12.12
申请人 DISCO ABRASIVE SYST LTD 发明人 YAMAMOTO KAZUHITO;TANIMOTO CHUICHI
分类号 B24B37/12;H01L21/304 主分类号 B24B37/12
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