发明名称 METHOD ALLOWING THE CREATION OF NANOMETRIC STRUCTURES BY SELF-ASSEMBLY OF BLOCK COPOLYMERS
摘要 The invention relates to a method allowing the creation of nanometric structures by self-assembly of block copolymers, of which at least one of the blocks can be crystallised or has at least one liquid crystal phase.
申请公布号 WO2015087005(A1) 申请公布日期 2015.06.18
申请号 WO2014FR53279 申请日期 2014.12.11
申请人 ARKEMA FRANCE;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;INSTITUT POLYTECHNIQUE DE BORDEAUX;UNIVERSITE DE BORDEAUX 发明人 MUMTAZ, MUHAMMAD;AISSOU, KARIM;BROCHON, CYRIL;CLOUTET, ERIC;FLEURY, GUILLAUME;HADZIIOANNOU, GEORGES;NAVARRO, CHRISTOPHE;NICOLET, CELIA;CHEVALIER, XAVIER
分类号 C09D153/00;B82Y40/00;G03F1/00;H01L21/033 主分类号 C09D153/00
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