发明名称 WORKPIECE POSITIONING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a workpiece positioning apparatus which is capable of reliably fixing a workpiece at a predetermined position while allowing size reduction without reducing the maximum positioning width for the workpiece, and which can be suitably used in an environment where cleanliness is required. ! SOLUTION: A workpiece positioning apparatus 10A comprises: an intermediate part 14 provided in a slidable manner on a flat surface of a base part 12; a table part 16 which slides on the intermediate part 14; and a pressing part 18 for locking the table part 16. The table part 16 has a cover part 92 which is provided on a table body 98 and extends to the outer side in the radial direction of the intermediate part 14. The table body 98 and the cover part 92 form a movable space S in which the pressing part 18 can be relatively displaced. ! COPYRIGHT: (C)2015,JPO&INPIT
申请公布号 JP2015111648(A) 申请公布日期 2015.06.18
申请号 JP20140063670 申请日期 2014.03.26
申请人 SMC CORP 发明人 SHIMODA HIROMI ; ISHIBE JIROU ; NISHIKAWA TAKESHI
分类号 H01L21/68;F16C19/10;F16C19/55;F16C33/38 主分类号 H01L21/68
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