| 摘要 |
An internal temperature sensor capable of measuring the internal temperature of a measurement subject with good precision and responsiveness. An internal temperature sensor (20) is provided with: substrates (21, 22) in contact on one side thereof with a surface to be measured of the measurement subject during measurement of the internal temperature of the measurement subject; a heat flux sensor (30) having a first temperature measurement part and a second temperature measurement part provided on the other side of the substrates and manufactured by a MEMS process, the heat flux sensor (30) including a thin-film part in which a thermopile (32) is formed for detecting a temperature difference between the first temperature measurement part and the second temperature measurement part, and the thin-film part being supported so that a space between the first temperature measurement part and the substrates is present due to a thermally conductive member for conducting heat from the measurement subject which flows in via the substrates to the second temperature measurement part, and the thin-film part is parallel to the substrates; and a temperature sensor (41) for measuring the temperature of the portion of the substrate in contact with the thermally conductive member. |
