| 摘要 |
PROBLEM TO BE SOLVED: To provide a drawing device capable of drawing a pattern during acceleration/deceleration of a stage, without changing a frequency of a clock signal. ! SOLUTION: A drawing device comprises: a data creation unit 21 which creates drawing data indicating an irradiation amount of a beam to irradiate a unit region 109 on a substrate 10; and a beam control unit 104 which controls the beam on the basis of a clock signal in at least one of acceleration and deceleration zones as well as in a constant speed zone of a stage 11 that is driven with the substrate 10 held thereon. The data creation unit 21 creates the drawing data on the basis of: driving data; and the clock signal common to at least one of the acceleration and deceleration zones and the constant speed zone. The control unit 104 draws a pattern on the substrate 10 on the basis of the drawing data. ! COPYRIGHT: (C)2015,JPO&INPIT |
