| 摘要 |
An apparatus for inspecting a substrate comprises: an air flotation module spraying air to a lower surface of the substrate and floating the substrate; a substrate transfer module transferring the substrate floated by the air flotation module; and an inspection module arranged at the top of the air flotation module and detecting defect of the substrate transferred by the substrate transfer module. The substrate transfer module comprises: a base panel; an upper panel installed to be rotatable on the base panel; a vacuum chuck arranged on the upper panel and holding the center of the lower surface of the substrate floated by the air flotation module; an angle adjustment unit arranged on the base panel and rotating the upper panel to adjust an arrangement angle of the substrate held by the vacuum chuck; and a driving unit horizontally transferring the base panel. |
