GAS PEMEABLITY MEASURING APPARATUS AND GAS PEMEABLITY MEASURING METHOD

摘要

Provided are a gas permeability measuring apparatus and a gas permeability measuring method. The gas permeability measuring apparatus comprises: a first chamber which is filled with a measuring gas and maintained under constant pressure; a second chamber serially connected to the first chamber; a third chamber serially connected to the second chamber; a separation plate which includes a through hole and separates the second chamber from the third chamber; a conductance adjuster which is placed at the portion connecting the second chamber and third chamber and adjusts the conductance through the through hole of the separation plate; a vacuum pump which is connected to the third chamber to discharge the gas in the third chamber to the outside; and a differential pressure measurer which measures the differential pressure between the second chamber and third chamber. A sample is placed at the portion connecting the first chamber and second chamber, the measuring gas pass through the sample to be transmitted into the second chamber, and the conductance adjuster can sequentially set at least two different values of the conductance.