| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To detect a defect with one set of light sources and a line sensor type camera, and to determine the type of the defect. <P>SOLUTION: This visual inspection device includes a linear light source 2 for obliquely illuminating the surface of an inspecting object 5 sent in a fixed direction, a line sensor type camera 1 for capturing reflected light on the surface of the inspecting object of the light from the light source, and an image processing circuit 3 for detecting a defect from the contrast of an output image from the camera. The position of the intersection point of the optical axis L2 of the light source and the surface of the inspecting object is shifted from the position of the intersection point of the optical axis L1 of the camera and the surface of the inspecting object, and the angleα' which the light leading from the light source to the position of the intersection point of the optical axis of the camera and the surface of the inspecting object forms with the surface of the inspecting object is made smaller than the angleαwhich the optical axis of the light source forms with the surface of the inspecting object. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
