APPARATUS FOR TESTING A SEMICONDUCTOR DEVICE AND METHOD OF TESTING SEMICONDUCTOR DEVICE

摘要

An apparatus (1A) for testing a semiconductor device includes: a tester (2) which generates an operation pulse signal inputted to a semiconductor device (3); a light source (5) which generates light; a light splitter optical system (6) which emits light to the semiconductor device (3); a light detector (7) which detects a reflection light reflected from the semiconductor device (3) and outputs a detection signal; an analog signal amplifier (8) which amplifies a detection signal and outputs an amplification signal; and an analysis device (10) which analyzes the operation of the semiconductor device (3) based on the amplification signal and a correction value. The correction value is calculated based on a signal which corresponds to a harmonic wave of the basic frequency of the operation pulse signal and is amplified by the analog signal amplifier (8).