| 摘要 |
PROBLEM TO BE SOLVED: To provide a downsized and accuracy-heightened function element capable of detecting the physical quantity of three orthogonal axes.SOLUTION: The function element comprises: a drive part; a first mass part excited in a first direction; a first coupling part connected to the first mass part and capable of a first movement for telescopic motion and extension in the first direction; a second coupling part connected to the first coupling part, extending in a second direction intersecting the first direction, and capable of a second movement for rotation with the second direction as an axis; and a second mass part connected to the second coupling part. |
