| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device for an acceleration sensor, which can shorten the inspection time with a simplified heat source facility.SOLUTION: The inspection device comprises: a sensor set unit 3 where an acceleration sensor S mounted on an inspection board 2 is set; a cold heat application unit 4 that is provided for the sensor set unit 3 and increases or decreases the temperature of the acceleration sensor S; a cold heat supply source 5 that supplies dry air for increasing or decreasing the temperature to the cold heat application unit 4; a medium flow path 6 that connects between the cold heat supply source 5 and the cold heat application unit 4; a measurement unit 7 that measures an output signal of the acceleration sensor S; a first rotation driving unit 8 that rotatably supports the sensor set unit 3 in a first plane surface; and a second rotation driving unit 9 that rotatably supports the sensor set unit 3 and the first rotation driving unit 8 in a second plane surface orthogonal to the first plane surface. |
