TRANSPORTIMG ROBOT, SUBSTRATE TREATING APPARATUS, AND DISCHARGING METHOD OF PARTICLE

摘要

The present invention provides a transporting robot. The transporting robot comprises: an arm on which a substrate is laid; a base to support the arm; and a driving unit to move the base. The driving unit may comprise: a vertical frame having a slit-shaped hole provided on one side in a vertical direction, into which one end of the base is inserted; a bracket placed inside the vertical frame and joined to one end of the base; a driving member to move the bracket in a vertical direction; a fan placed inside the vertical frame to discharge particles inside the vertical frame to the outside; a sensor placed inside the vertical frame to measure particle masses; and a controller into which a measurement value is inputted from the sensor to control a rotational speed of the fan in accordance with the measurement value.