METHOD AND APPARATUS FOR MANUFACTURING LAMINATE AND LAMINATE

摘要

PROBLEM TO BE SOLVED: To provide a laminate including a transparent conductive layer showing a low sheet resistance. ! SOLUTION: A transparent conductive layer 17a on one side includes; a first metal oxide layer 18a and a second metal oxide layer 19a formed on a surface at a distant side from a substrate film 12, of the first metal oxide layer. The first metal oxide layer 18a is formed by sputtering in a first film deposition chamber 31 to which oxygen gas is supplied at a first flow rate F1. The second metal oxide layer 19a is formed by sputtering in a second film deposition chamber 33 to which oxygen gas is supplied at a second flow rate F2. Here the first flow rate F1 is larger than the second flow rate F2. ! COPYRIGHT: (C)2015,JPO&INPIT