| 摘要 |
<p>Provided is a light irradiating device capable of preventing or suppressing a reaction product between pollutant such as organics attached to an irradiated object and pollutant contained in the atmosphere from being attached to the irradiated object, so as to reliably complete required light cleaning processing. The light irradiating device is characterized by comprising: an excimer lamp; a lampshade which is arranged to surround the excimer lamp and has an opening used for emitting a light from the excimer lamp towards outside and a gas outlet used for discharging the gas at an inner part; and a gas discharge mechanism used for leading the atmosphere towards the inner part of the lampshade from the opening of the lampshade and discharging the atmosphere from the gas outlet of the lampshade; wherein, the excimer lamp is provided with a light shield unit used for shielding irradiated lights in the way that the irradiated lights of the excimer lamp can not irradiate to a wall forming a gas flow path in the lampshade.</p> |
