Inductor structure with magnetic material

摘要

Embodiments of mechanisms of forming an inductor structure are provided. The inductor structure includes a substrate and a first dielectric layer formed over the substrate. The inductor structure includes a first metal layer formed in the first dielectric layer and a second dielectric layer over the first metal layer. The inductor structure further includes a magnetic layer formed over the first dielectric layer, and the magnetic layer has a top surface, a bottom surface and sidewall surfaces between the top surface and the bottom surface, and the sidewall surfaces have at least two intersection points.

主权项

1. An inductor structure, comprising:
a substrate; a first dielectric layer formed over the substrate; a first metal layer formed in the first dielectric layer; a second dielectric layer over the first metal layer; a magnetic layer formed over the first dielectric layer, wherein the magnetic layer has a top surface, a bottom surface and sidewall surfaces between the top surface and the bottom surface, and the sidewall surfaces have at least two intersection points, and wherein the sidewall surfaces comprise a first pair of sidewall surfaces adjoin the bottom surface and a second pair of sidewall surfaces adjoin the first pair of sidewall surfaces, wherein the first pair of sidewall surfaces are vertical to the bottom surface of the magnetic layer; and the second pair of sidewall surfaces taper gradually toward the top surface of the magnetic layer.