发明名称 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE CONTAINING A CURED FILM USING SAID COMPOSITION
摘要 The present invention provides a positive-type photosensitive resin composition capable of obtaining a cured film which exhibits low warpage, and is also excellent in high sensitivity and high resolution during firing at a lower temperature of 250°C or lower. Disclosed is a positive-type photosensitive resin composition including (a) a polyimide resin including a structural unit represented by the general formula (1) and a structural unit represented by the general formula (2), and (b) a quinonediazide compound, wherein the polyimide resin including a structural unit represented by the general formula (1) and a structural unit represented by the general formula (2) has an imidation ratio of 85% or more, and also a ratio of the structural unit represented by the general formula (1) to the structural unit represented by the general formula (2) is within a range of 30:70 to 90:10, in which X 1 in the general formula (1) represents a tetracarboxylic acid residue including 1 to 4 aromatic rings, and Y 1 represents an aromatic diamine residue including 1 to 4 aromatic rings, and in which X 2 in the general formula (2) represents a tetracarboxylic acid residue including 1 to 4 aromatic rings, and Y 2 represents a diamine residue including at least two or more alkylene glycol units in the main chain.
申请公布号 SG11201501594U(A) 申请公布日期 2015.05.28
申请号 SG11201501594U 申请日期 2013.09.11
申请人 TORAY INDUSTRIES, INC. 发明人 ONISHI, HIROYUKI;MASUDA, YUKI;TOMIKAWA, MASAO
分类号 G03F7/023;C08G73/10;C08L79/08;G03F7/004 主分类号 G03F7/023
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