Device for holding disk-shaped articles and method thereof

摘要

A device for holding disk-shaped articles and a method thereof are provided. The device comprises a rotatable chuck body and at least two groups of clamping elements arranged at the edge of the chuck body. Each of the clamping elements is mounted to a pivot with the chuck body respectively by means of the rotation of the clamping element with respect to the chuck body. A radial compression spring is connected between the bottom of the clamping element and the chuck body to provide a clamping force for the clamping element. The clamping elements in the same group are provided with magnets with the same polarity, while the clamping elements in different groups are provided with magnets with the opposite polarity. Two sets of electromagnets are arranged on the chuck body and spaced apart evenly.

主权项

1. A method for holding a disk-shaped article by a device, the device comprises a rotating shaft, and a chuck body driven by the rotating shaft for supporting the disk-shaped article, wherein a first group of clamping elements and a second group of clamping elements are mounted on the edge of the chuck body, each group of clamping elements comprise at least 3 clamping elements each with a ferromagnetic material and able to rotate around a mounting point with respect to the chuck body; the clamping elements in the first group have a first magnet polarity, while the clamping elements in the second group have a second magnet polarity opposite to the first magnet polarity; the inner circumference of the chuck body is provided with two sets of electromagnets having controllable polarity and energization time; the method comprising the step of:
in the beginning of cleaning the disk-shaped article, de-energizing the two sets of electromagnets, rotating the chuck body; during cleaning of the disk-shaped article, making the first group of the clamping elements and the second group of the clamping elements clamp alternately by changing the current direction in the electromagnets to clean the clamped portion of the disk-shaped article; wherein when the disk-shaped article is rotated at a low speed, the two sets of electromagnets are energized in the same polarity; when the disk-shaped article is rotated at a high speed, one set of electromagnets is energized to enable the clamping elements in the clamping state to be completely release, while the other set of electromagnets is de-energized; after cleaning the disk-shaped article, releasing all the clamping elements by generating a repulsion force between the electromagnets and the clamping elements.