QUANTUM OPTICAL DEVICE AND ITS MANUFACTURING METHOD

摘要

The present invention relates to a quantum optical device and a manufacturing method thereof and, more particularly, to a quantum optical device which includes a substrate, an n-type gallium nitride semiconductor layer which is formed on the substrate, and a nanostructure layer which is formed on at least part of the n-type gallium nitride semiconductor layer. The nanostructure layer includes a nanostructure and a metal layer which covers at least part of the n-type gallium nitride semiconductor and the nanostructure. The nanostructure has a top side with a circular cone or a polygonal pyramid and includes an active layer which is formed on at least part of the top side with a quantum structure. The quantum optical device has the high light extraction efficiency of the quantum structure. The production efficiency of the quantum optical device is improved by easily combining the quantum structure with a nano-resonator.