| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the operability of an operation of moving an imaging part.SOLUTION: A substrate inspection system includes a display device having imaging parts 4a and 4b for imaging an upper surface 100a and a lower surface 100b of a substrate 100, moving mechanisms 3a and 3b for moving the imaging parts 4a and 4b and a display processing part for allowing a display part to display each image captured by the imaging parts 4a and 4b. The substrate inspection system is configured to inspect the substrate 100 on the basis of an electric signal input and output through a probe 51 probing at a probing position specified on the basis of the moving amounts of the imaging parts 4a and 4b and each image. The display device allows the display part to display each image in a state that a positional relation of a mark Ma in the upper surface 100a and a positional relation of the mark Ma in the image in the plan view of the upper surface 100a are made equal, and that a positional relation of a mark Mb in the lower surface 100b and a positional relation of the mark Mb in the image in the view of the lower surface 100b from the upper surface 100a through the substrate 100 are made equal.</p> |
