| 发明名称 |
SETUP FOR MULTIPLE CROSS-SECTION SAMPLE PREPARATION |
| 摘要 |
A multiple-sample-holder polishing setup for cross-section sample preparation and a method of making a device using the same are presented. The multiple-sample-holder polishing setup includes a frame. The frame has a hollow center, one or more long and short rods and a recess for accommodating a polishing head. The setup includes one or more sample holders. The sample holder is to be attached to the one or more long and short rods of the frame. A paddle is affixed to each sample holder. A sample is attached to the paddle. The sample is coated with a thin epoxy layer prior to polishing thereby allowing for easy inspection for site of interests as well as quick material removal. |
| 申请公布号 |
US2015140688(A1) |
申请公布日期 |
2015.05.21 |
| 申请号 |
US201314084636 |
申请日期 |
2013.11.20 |
| 申请人 |
GLOBALFOUNDRIES Singapore Pte. Ltd. |
发明人 |
NG Tsu Hau;MAI Zhihong;DAWOOD Mohammed Khalid Bin;TAN Pik Kee;HUANG Yamin;LAM Jeffrey Chor-Keung |
| 分类号 |
H01L21/67;H01L21/304;H01L21/66;B24B49/12 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A multiple-sample-holder polishing setup for cross-section sample preparation comprising:
a frame, the frame having a hollow center, one or more long and short rods and a recess for accommodating a polishing head; one or more sample holders, the sample holder to be attached to the one or more long and short rods of the frame; a paddle affixed to each sample holder; and a sample attached to the paddle, wherein the sample is coated with a thin epoxy layer prior to polishing thereby allowing for easy inspection for site of interests as well as quick material removal. |
| 地址 |
Singapore SG |
