WAFER BONDER, WAFER BONDING APPRATUS, AND WAFER BONDING METHEOD USING PLASMA ACTIVATION PROCESS,申请号KR20130154144-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	WAFER BONDER, WAFER BONDING APPRATUS, AND WAFER BONDING METHEOD USING PLASMA ACTIVATION PROCESS
摘要	A wafer bonding apparatus according to an aspect of the present invention includes a support unit for holding a first wafer, a vacuum holder which supports a second wafer facing the first wafer and forms a vacuum pressure. The vacuum holder includes decompression holes which are separated in the diameter direction of the wafer. Different vacuum pressures can be applied to the decompression hole.
申请公布号	KR101521971(B1)	申请公布日期	2015.05.20
申请号	KR20130154144	申请日期	2013.12.11
申请人	HUTEM CO., LTD.	发明人	SHIN, HONG SOO;DO, HYUN JUNG;KIM, JIN WON
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

您可能感兴趣的专利

ENDOSCOPE INSERT PART, ENDOSCOPE, AND ENDOSCOPE SYSTEM

Selektive Acetylenhydrierung

Guard rail for building, has foot plate provided with fastening devices for assembling on underground, and rod comprising eye at its free end, where devices comprise tilting dowels that are guided in holes attached in base plate

Collecting tray for collecting fluid leakage, has collar receiving footprint formed by plastic palettes, and supporting parts supporting footprint while load is placed on tray top, where inside dimension of the tray suits outside dimension

Advertising medium e.g. placard holder, for advertising e.g. optical information of product, has data storage unit and transmitting device arranged such that data is transferred to cell phone of person within device transmission range

Glass bottle e.g. wine bottle, has mouth piece compounded with interior bulge that serves as mounting plate of cork, where cork is provided with groove that engages into bulge and locks bottle closely

Garden equipment e.g. lawn mover, cable mounting device, has rod attachable to body of operating person and with retainer for cable, and belt provided for admission of rod, where position of rod is changeable for body

Plate for serving e.g. soup, has rim whose height varies continuously over plate circumference, where rim portion with maximum height lies opposite to user, and anti-slip batten is retained in circular groove at plate`s lower surface

Modular signal line connector with front and rear row of free metal pins at end of its main part, each pin coupled to signal line

Toy vehicle e.g. sports car, has paint coating with electrical conductive layer applied on part of plastic-vehicle body, where layer is chargeable with positive or negative electric charges

Food cooler for cooling children~s food comprises a fan producing an air current which is blown through an opening in a housing

Apparatus for controlling a magnetic force using electromotor force such as for switching transformers and having a switch unit for changing the input and output connections

Compensator bellow for movemental admission of piping for transport of gaseous or liquid medium, has filling hole provided for adhering tube ends, inserted into connecting ends, in one of patterns

Contractable storage tank for supplying e.g. fluid substance e.g. cream, has lower part having higher rigidity and/or smaller elasticity than upper part, where upper part and lower part are partially made of plastic

Sealing device for filler neck of motor vehicle tank, has telescope units to guide cap on flap and allow movement of flap on cap during closing of flap, and spring between flap and cap to press cap against neck during closing of flap

Wrist training device rotation counter for use with e.g. notebook computer, has generator module supplying power for collection unit, when rotor is in rotation, which generates signal based on acquisition of number of rotation of rotor

Drinking vessel e.g. bar glass, for beverages, has shell with anti-slip gripping portion formed as decoration, pattern or tactile distinguishable information in form of script or symbols in handle

Two piece electromechanical foot massage device, has upper part having form adapted to heel of foot, and lower part, which is shaped in such a manner that massage of instep and sides of foot are effected during application of device

HIGH FREQUENCY DIELECTRIC PORCELAIN COMPOSITION AND DIELECTRIC ELEMENT

GLASS DOOR WING THAT CAN PIVOT ABOUT AN UPPER AND LOWER TRUNNION