MEASURING DEVICE, LITHOGRAPHY DEVICE, AND ARTICLE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique that is advantageous in highly accurately positioning a stage.SOLUTION: A measuring device that measures the position of a stage holding a base plate comprises: an encoder including a scale and a light receiving part for receiving light from the scale, and configured to determine the position of the stage from the result of the light detected by a light receiving part; a support member supporting the scale; a plurality of detecting parts configured to detect the surface temperature of each of the areas of the scale; and a control section. The support member has a plurality of channels, along which a fluid is caused to flow, so as to correspond to the areas. The control section independently controls the temperatures of the fluid flowing in the corresponding channels, such that the surface temperatures detected by the corresponding detecting parts reach the corresponding target temperatures.