METHOD FOR MANUFACTURING A MULTIPLE-AXIS THERMAL CONVECTION-TYPE ACCELEROMETER

摘要

A thermal convection-type accelerometer includes a first insulating substrate, a circuit formed on the first insulating substrate, a first acceleration-sensing device coupled with the circuit, and a first supporting layer attached on the insulating substrate. The first acceleration-sensing device includes two temperature-sensing components and a heater disposed between the temperature-sensing components. The temperature-sensing components and the heater are directly formed on the first supporting layer.

主权项

1. A method for manufacturing a multiple-axis thermal convection-type accelerometer, comprising the steps of:
forming a supporting layer on an insulating substrate; forming two temperature-sensing components directly on the supporting layer; and forming a heater directly on the supporting layer and between the two temperature-sensing components.