| 发明名称 |
MECHANISMS FOR FURNACE APPARATUS AND WAFER BOAT |
| 摘要 |
Embodiments of mechanisms of a furnace apparatus having a wafer boat are provided. The wafer boat includes a base plate and a support rod extended from the base plate. The wafer boat also includes a support finger including a finger body extended from the support rod and a curved end portion extended from the finger body. The wafer boat further includes a top plate supported on the support rod. A width of the support rod exceeds that of the support finger. |
| 申请公布号 |
US2015128863(A1) |
申请公布日期 |
2015.05.14 |
| 申请号 |
US201314079803 |
申请日期 |
2013.11.14 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
LIN Yi-Chang;LIN Hsin-Hong |
| 分类号 |
H01L21/673;C23C16/458 |
主分类号 |
H01L21/673 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A wafer boat, comprising:
a base plate; a support rod extended from the base plate; a support finger comprising:
a finger body extended from the support rod; anda curved end portion extended from the finger body; and a top plate supported on the support rod, wherein a width of the support rod exceeds that of the support finger. |
| 地址 |
HSIN-CHU TW |
