| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating method that enables a thin functional coating in various materials, a coated component, and a nebulizer including the component.SOLUTION: In a method for coating a surface (44), particularly, a microstructure surface, of a component (55) including various materials, particularly, glass and silicon, the surface (44) is firstly activated and subsequently coated. The method is used so that an oxidizing solution, a basic solution or a piranha solution can activate the surface (44). |
