发明名称 回折顕微法
摘要 Disclosed is a diffraction microscopy capable of reducing influence of an increase in the incident angle range of a beam. Specifically disclosed is a diffraction microscopy in which a beam is incident on a sample, in which the intensity of a diffraction pattern from the sample is measured, and in which an image of an object is rebuilt using Fourier interactive phase retrieval on the basis of the measured intensity of the diffraction pattern. In this method, Fourier interactive phase retrieval is performed using deconvolution on the diffraction pattern subjected to convolution by the increase in the incident angle range of the beam.
申请公布号 JP5717296(B2) 申请公布日期 2015.05.13
申请号 JP20110551750 申请日期 2011.01.21
申请人 发明人
分类号 G01N23/20;H01J37/22;H01J37/26;H01J37/295 主分类号 G01N23/20
代理机构 代理人
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