发明名称 |
ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF |
摘要 |
<p>The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1): -A-B-C- (1) where A is a fused aromatic ring, B has a structure (2), and C is a hydroxybiphenyl of structure (3) where R1 is C1-C4alkyl and R2 is C1-C4alkyl. The invention further relates to a process for forming an image using the composition.</p> |
申请公布号 |
EP2691439(B1) |
申请公布日期 |
2015.05.13 |
申请号 |
EP20120715147 |
申请日期 |
2012.03.27 |
申请人 |
MERCK PATENT GMBH |
发明人 |
RAHMAN, M. DALIL;MCKENZIE, DOUGLAS;SHAN, JIANHUI;CHO, JOONYEON;MULLEN, SALEM, K.;ANYADIEGWU, CLEMENT |
分类号 |
C08G61/02;C09D165/00;G03F1/46;G03F7/09;H01L21/027 |
主分类号 |
C08G61/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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