APPARATUS FOR FORMING PATTERN LINE BY ELECTROHYDRODYNAMICS AND FORMING METHOD OF PATTERN BY ELECTROHYDRODYNAMICS

摘要

The present invention relates to a pattern line forming apparatus using electrohydrodynamics and a pattern line forming method using electrohydrodynamics and, more specifically, to a pattern line forming apparatus using electrohydrodynamics and a pattern line forming method using electrohydrodynamics to have simple equipment configuration and pattern forming process without a high temperature and pressure process used in conventional CVD. According to the present invention, the pattern line forming apparatus using electrohydrodynamics comprises: a nozzle unit to discharge ink in order to form a pattern line on a substrate; a stage on which the substrate is placed; a voltage waveform generation unit to generate a voltage waveform to be supplied to the nozzle unit in order to control the shape of patterns formed on the substrate by ink discharged from the nozzle unit using a drop-on-demand (DOD) method; and a control unit to control the nozzle unit, the stage, the voltage waveform generation unit, and an ink discharge device for forming a pattern line in order to form a predetermined shape of pattern line on the substrate.