OPTICAL SCANNER APPARATUS AND OPTICAL SCANNER CONTROL APPARATUS

摘要

An optical scanner apparatus includes first and second torsion beams which support a mirror support portion supporting a mirror from both sides in an axial direction; first and second horizontal driving beams configured to include first and second horizontal driving sources, respectively, a connecting beam; a first piezo-electric sensor; first and second sensor interconnects connected to one of and the other of an upper electrode and a lower electrode of the first piezo-electric sensor, respectively, the first sensor interconnect and the second sensor interconnect being formed to extend toward the first horizontal driving beam and the second horizontal driving beam, respectively.

主权项

1. An optical scanner apparatus comprising:
a mirror; a mirror support portion which supports the mirror; a torsion beam which supports the mirror support portion in an axial direction around which the mirror support portion is oscillated by torsion of the torsion beam; a driving source for oscillating the mirror and the mirror support portion; a piezo-electric sensor configured to detect a displacement when the mirror is being oscillated by a driving voltage applied to the driving source; a sensor interconnect connected to the piezo-electric sensor; and a guard pattern connected to a ground terminal and provided between the driving source and the sensor interconnect.