| 摘要 |
<p>Provided is a shape measuring method in which fitting is performed accurately between measured data of a surface to be measured which is formed based on a design shape having multiple periodical design level differences and a design shape. A level difference region and a level difference height are specified from a measured point sequence of the surface to be measured (S3). A point sequence is moved by a level difference height (S4). In other words, a process for eliminating the level difference is performed, and fitting target data without a level difference is obtained (S5). On the other hand, a reference shape without multiple design level differences is obtained from the design shape (S6 and S7). Fitting between the fitting target data and the reference shape is performed by the least square method or the like (S8).</p> |
