GAS SUPPLY UNIT FOR SUPPLYING MULTIPLE GASES, AND METHOD FOR MANUFACTURING SAME

摘要

The present invention relates to a gas supplying unit for supplying multiple gases. According to one embodiment of the invention, there is provided a gas supplying unit for supplying multiple gases, comprising an outer pipe and at least one inner pipe positioned inside of the outer pipe, wherein a first process gas supplied to the inner pipe is jetted outwardly from the outer pipe through a plurality of first gas jet orifices, and a second process gas supplied to the outer pipe is jetted outwardly from the outer pipe through a plurality of second gas jet orifices.