发明名称 METHOD AND SYSTEM FOR REALIZING AUTOMATIC VALUE FILLING IN GLASS SUBSTRATE EXPOSURE PROCESS
摘要 <p>Disclosed is a system for realizing automatic value filling in a glass substrate exposure process. The system comprises a measuring machine (1), a communication interface module network (3), and an exposure machine (2), wherein the measuring machine (1) is used for automatically measuring an exposed glass substrate and uploading measured exposure offset data of various measuring points to a preset storage area of the exposure machine (2) through the communication interface module network (3); the exposure machine is used for obtaining corresponding value filling amounts of the various measuring points depending on the exposure offset data of the measuring points, and performing value filling treatment on the exposure points corresponding to the measuring points on the glass substrate. A corresponding method for realizing automatic value filling is also disclosed. The system and method can be used for improving the value filling efficiency and value filling accuracy of the exposure machine, and saving labor.</p>
申请公布号 WO2015058472(A1) 申请公布日期 2015.04.30
申请号 WO2014CN70363 申请日期 2014.01.09
申请人 SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 HUANG, WENDE;SHI, KAI;ZHANG, SHUHAN
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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