MASS DISTRIBUTION MEASUREMENT METHOD AND MASS DISTRIBUTION MEASUREMENT APPARATUS

摘要

Projection TOF mass spectrum distribution information is acquired by irradiating a first ionizing beam onto a surface of a specimen to acquire first mass spectrum distribution information on secondary ions generated from the specimen, irradiating a second ionizing beam onto the same surface to acquire second mass spectrum distribution information on secondary ions generated from the specimen, and correcting the second mass spectrum distribution information on the basis of the first mass spectrum distribution information.

主权项

1. A projection TOF mass spectrum distribution information acquisition method comprising:
a first step of irradiating a first ionizing beam onto a surface of a specimen and acquiring first mass spectrum distribution information on secondary ions generated from the specimen as a result of irradiation of the first ionizing beam; a second step of irradiating a second ionizing beam onto the surface of the specimen and acquiring second mass spectrum distribution information on secondary ions generated from the specimen as a result of irradiation of the second ionizing beam; and a third step of correcting the second mass spectrum distribution information on the basis of the first mass spectrum distribution information; the third step including correcting a delay distribution of secondary ion generation times in the second mass spectrum distribution information on the basis of the first mass spectrum distribution information.