发明名称 基板ケース及び基板収容装置
摘要 <p>A substrate case includes a shaft portion around which a sheet-shaped substrate having a circuit area in which a circuit manufacturing process is performed is wound; and a cover portion that accommodates the substrate in the state of being wound around the shaft portion, the shaft portion having a holding portion that holds an area different from the circuit area at a winding start portion of the substrate.</p>
申请公布号 JP5708649(B2) 申请公布日期 2015.04.30
申请号 JP20120528573 申请日期 2010.12.28
申请人 发明人
分类号 H01L21/673;B65D85/86;G03F7/20;H01L21/027 主分类号 H01L21/673
代理机构 代理人
主权项
地址
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