| 摘要 |
PROBLEM TO BE SOLVED: To provide a photovoltaic element which enables the decrease in a reduction in a curve factor, and achievement both of the increase of the amount of light introduced into a photoelectric conversion layer and the enhancement in the curve factor.SOLUTION: A method for manufacturing a photovoltaic device comprises the steps of: introducing hydrogen gas into a deposition chamber 103 through an introduction pipe 32 so that about 1% of hydrogen is included in an atmosphere when forming a transparent electrode film on a substrate 11; and evaporating IWO from inside a melting pot 104 by an electron flow emitted from arc plasma gun 105, thereby depositing the evaporated IWO on the substrate 11 together with oxygen introduced from an introduction pipe 31 and the hydrogen introduced from the introduction pipe 32. |
