发明名称 |
Method of manufacturing ferroelectric thin film |
摘要 |
A method of manufacturing a ferroelectric thin film on a lower electrode by electrostatically spraying a ferroelectric thin film-forming electrostatic spray solution so as to coat the electrostatic spray solution on the lower electrode and form a coated film, drying, calcining, and then firing the coated film so as to crystallize the coated film. In this method, the electrostatic spray solution is a mixed solution in which a ferroelectric thin film-forming sol-gel solution and powder having the same composition as the solid content of the sol-gel solution and having a particle diameter that can be ejected from the spout are uniformly mixed, and, when the metallic compound-converted mass of a metallic compound dissolved in the sol-gel solution is represented by A and the mass of the powder is represented by B, a ratio of B with respect to (A+B) is in a range of 5% to 40%. |
申请公布号 |
US9017770(B2) |
申请公布日期 |
2015.04.28 |
申请号 |
US201313828698 |
申请日期 |
2013.03.14 |
申请人 |
Mitsubishi Materials Corporation |
发明人 |
Iida Shintaro;Sakurai Hideaki |
分类号 |
H01L41/314;C23C24/00;H01L21/02;H01L41/318;C23C18/12;B05B5/16 |
主分类号 |
H01L41/314 |
代理机构 |
Locke Lord LLP |
代理人 |
Locke Lord LLP |
主权项 |
1. A method of manufacturing a ferroelectric thin film on a lower electrode by electrostatically spraying a ferroelectric thin film-forming electrostatic spray solution from a spout of a capillary toward the lower electrode of a substrate having the lower electrode so as to coat the electrostatic spray solution on the lower electrode and form a coated film, drying, calcining, and then firing the coated film so as to crystallize the coated film,
wherein the electrostatic spray solution is a mixed solution in which a ferroelectric thin film-forming sol-gel solution and powder having the same composition as a solid content of the sol-gel solution and having a particle diameter that can be ejected from the spout are uniformly mixed, and when a metallic compound-converted mass of a metallic compound dissolved in the sol-gel solution is represented by A and a mass of the powder is represented by B, a ratio of B with respect to (A+B) is in a range of 5% to 40%. |
地址 |
Tokyo JP |