| 摘要 |
<p>PROBLEM TO BE SOLVED: To execute environmental cleanup, including sterilization and disinfection, reliably.SOLUTION: An environmental cleanup apparatus is configured so as to irradiate a target 14 arranged in a vacuum tank 11 with a pulse laser beam 20 from the outside entering through a transmission window 12 of the vacuum tank 11 to generate a plasma plume 23 from the surface of the target 14 and apply the plasma plume 23 to an environmental-cleanup object 24 mounted on a mounting table 17 serving as mounting means arranged so as to face the target 14. The plasma plume 23 is known to have various types of ionization layers from high to low energy, including a high ionization layer 23a, a middle ionization layer 23b and a low ionization layer 23c, and it is also known that parts almost consisting of radical particles alone are present.</p> |
