ION TRAP APPARATUS AND METHOD FOR MANUFACTURING SAME

摘要

An embodiment of the present invention provides an ion trap apparatus and a method for manufacturing the same, the ion trap apparatus comprising: one or more central DC electrodes including a DC connection pad on a semiconductor substrate and a DC rail connected to the DC connection pad; an RF electrode including one or more RF rails located adjacent to the DC rail and an RF pad connected to the one or more RF rails; and one or more side electrodes including one or more side electrode pads located opposite to the DC electrode with respect to the RF electrode, wherein each electrode has a rounded edge at a portion facing another electrode.