| 摘要 |
The present invention relates to a substrate support unit for supporting a substrate, comprising: an up and down operation unit capable of moving up and down, having a transfer table which transfers the substrate up and down; a support which is installed on a side of the transfer table in a vertical direction, wherein the substrate is supported on a surface; and a first elastic machine installed to connect a gap between the transfer table and the support and having an elastic force. Therefore, according to an embodiment of the present invention, as an upper support is manufactured by the same structural steel like metal or metal alloy, a support surface of the upper support wherein the substrate is supported is flatter than a support surface of a conventional elastic body plate. In other words, a flat degree of the upper support wherein the substrate is supported is more improved than in the past, thereby suppressing or preventing a twisted alignment state between the upper substrate and the lower substrate by the flat degree of the upper support. Further, as an elastic member is formed in an adhesive pin supporting the upper substrate with adhesive power, even if the upper substrate is inserted into a chamber unit to be inclined, the upper substrate can be corrected to be in parallel with the upper support. |
