APPEARANCE INSPECTION DEVICE AND APPEARANCE INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an appearance inspection device and appearance inspection method with which, for example, a reduction in accuracy of detection can be suppressed for the shape of an abnormal area of an inspection object surface of an inspection object.SOLUTION: An appearance inspection device according to an embodiment includes a pseudo image data creation unit that creates surface shape data of an inspection object surface for each imaging data and creates image data of a two-dimensional pseudo image by using the plurality of pieces of surface shape data, an abnormal area detection unit that processes the image data to detect an abnormal area on the inspection object surface, and a correction unit that extracts a plurality of feature points of the shape of the inspection object surface from the surface shape data and corrects the size in a first direction of the two-dimensional pseudo image from the plurality of extracted feature points and a plurality of reference feature points of reference surface shape data of the inspection object surface.