摘要 |
<p>PROBLEM TO BE SOLVED: To provide an air knife capable of preventing the residual of liquid, when performing liquid draining and drying of planar objects having different external dimensions, and to provide a drying apparatus including the same.SOLUTION: An air knife includes a main drying section (30) for blowing gas to the entire surface of a planar object (W) by relatively moving in one direction for the planar object (W), and an auxiliary drying section (31) for blowing gas selectively to a specific part (1) on the surface of the planar object (W).</p> |