发明名称 AIR KNIFE FOR DRYING AND DRYING APPARATUS INCLUDING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide an air knife capable of preventing the residual of liquid, when performing liquid draining and drying of planar objects having different external dimensions, and to provide a drying apparatus including the same.SOLUTION: An air knife includes a main drying section (30) for blowing gas to the entire surface of a planar object (W) by relatively moving in one direction for the planar object (W), and an auxiliary drying section (31) for blowing gas selectively to a specific part (1) on the surface of the planar object (W).</p>
申请公布号 JP2015079851(A) 申请公布日期 2015.04.23
申请号 JP20130216019 申请日期 2013.10.17
申请人 MITSUBISHI ELECTRIC CORP 发明人 MIYAZAKI ISAMU
分类号 H01L21/304;G02F1/13 主分类号 H01L21/304
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