RAW MATERIAL FOR FORMING THIN FILM, PRODUCTION METHOD OF THIN FILM, AND NEW PHOSPHORUS COMPOUND

摘要

PROBLEM TO BE SOLVED: To provide a raw material for forming a thin film that efficiently produces a thin film of high phosphorus concentration, and to provide a raw material for forming a thin film that is excellent in reactivity with a reactive gas and applicable to an ALD method, which is a method for obtaining a thin film having excellent step coverage.SOLUTION: A raw material for forming a thin film includes a phosphorus compound represented by general formula (1) below, (wherein Rindicates an alkyl group of 1-4 carbons; Rand Rindicate each independently hydrogen or an alkyl group of 1-4 carbons; and n indicates an integer of 1 or 2).